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超高真空電界放射形電子顕微鏡による半導体ナノ構造の創製と物性評価
(Fabrication and Analysis of Nanometer Size Structure of Semiconductor by UHV FE-TEM)
日本電子顕微鏡学会. 1998-05-13.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 01:27:57 +0900 Updated at: 2017-07-10 17:48:18 +0900