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整列イオンビームの垂直入射による薄膜の面内配向
(In-Plane Texturing of Thin Films by Right Angle Bomberdment of Aligned Ion Beam During Slouttering)
第４３回応用物理学関係連合講演会. March 26, 1996-March 29, 1996.
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Created at: 2017-02-18 01:03:07 +0900 Updated at: 2017-07-10 17:35:35 +0900