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Si結晶中の水素分子形成の基板温度依存性
(Substrate Temperature Dependence of the Formation of Hydrogen Molecules in Crystalline Silicon)
第57回応用物理学会学術講演会. September 07, 1996-September 10, 1996.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 01:06:41 +0900Updated at: 2017-07-10 17:37:20 +0900