Nanostructure fabrication by electron beam induced deposition with metal carbonyl precursor and water vapor
19th International Microprocesses and Nanotechnology Conference . 2006.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2022-09-05 11:52:53 +0900更新時刻: 2022-09-05 11:52:53 +0900