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Ｍｏ基板にマグネトロンスパッタ被覆したＴｉｘＣ１―ｘの特性
(Properties of TixC1-x Films Coated on Mo by Magnetron-Sputter)
日本原子力学会. 1982-10-10.
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Created at: 2017-02-18 00:04:48 +0900 Updated at: 2017-07-10 17:01:15 +0900