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Siの高周波プラズマ酸化表面のエリプソメータ測定.
(Ellipsometric Measurements of Silicon Surfaces Oxidized by rf Plasma.)
応用物理学会. October 09, 1991-October 12, 1991.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:42:02 +0900 Updated at: 2017-07-10 17:12:21 +0900