低ZTiC,TiN膜の残留応力
(Residual stress in Coated Low- Films of Tic and TiN)
3rd Topical Meeting on Fusion Reactor Materials. 1983-09-19.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-02-18 00:05:16 +0900 更新時刻: 2017-07-10 17:01:34 +0900