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Deposition of Oxynitride perovskite LaTiO2N thin films by Radio-Frequency magnetron sputtering

井上 忠彦, 大垣 武, 安達 裕, 村上 英司郎, 井上 政貴, 大橋 直樹.
Science and Technology of Advanced Ceramics (STAC-10). August 01, 2017-August 03, 2017.

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    Created at: 2017-06-07 22:43:50 +0900 Updated at: 2018-06-05 14:09:31 +0900

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