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ゲッター作用を持つTi-Nb膜の自己組成制御性
(Self-controlled surface of Nb-thin film with Ti Segregation as a getter material)
電気学会 電子材料研究会. 1997-09-09.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:38:03 +0900 Updated at: 2017-07-10 17:43:08 +0900