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窒素フッ素プラズマとシリコン表面相互作用の表面化学
(Surface Chemistry of NF3 Plasma and Si Surface Interaeraetion.)

Kitajima.M, Little.T.W, Endou.A, Miyamotu.A, Ohuchi.F.S, Kitajima.M, Little.T.W, Endou.A, Miyamotu.A, Ohuchi.F.S.
AVS45th International Symposium. November 02, 1998-November 06, 1998.

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      Created at: 2017-02-18 01:34:43 +0900 Updated at: 2017-07-10 17:51:57 +0900

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