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TEM-EELSの改良と半導体用絶縁膜への適用
(Improvement of TEM-EELS and its application for dielectric materials for semiconductor devices)
顕微鏡学会高分解能電子顕微鏡分科会. 2004-02-20. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:22:22 +0900Updated at: 2024-03-05 11:40:08 +0900