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Real-tine investigc tion of DC bias effects on ultra thin silicon film oxide geowth
(極薄膜酸化シリコン成長の直流バイアス効果の実時間研究)
第４１回米国真空協会シンポジウム(41AVS). October 23, 1994-October 30, 1994.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 00:53:26 +0900 Updated at: 2017-07-10 17:30:30 +0900