HOME > Presentation > Detail
電子ビームによるナノ構造創製
(Nanofabrication of Si and its related materials with an electron beam)
第46回日本電子顕微鏡学会シンポジウム. November 14, 2001-November 16, 2001.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:14:36 +0900 Updated at: 2022-09-05 11:14:36 +0900