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マグネトロンスパッタによるMo上のTiCコーティングの成膜条件と特性変化
(Charges in Characterization of Titanium Carbide Coatings Magnetron-sputtered on Molybdenum with Deposition Conditions)
7th Int'l Conf.on Vacuam Metallurgy. 1982-11-01.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 11:40:09 +0900 Updated at: 2017-07-10 17:00:47 +0900