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Si表面酸化で生成したSiO分子の多光子イオン化検出.
(MPI Detection of SiO Produced by Si Surface Oxidation.)
日本表面科学会. November 30, 1993-December 02, 1993.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:56:01 +0900 Updated at: 2017-07-10 17:26:47 +0900