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強磁性合金パーマロイ膜の反応性イオンエッチング
(Reactive Icn Etching for Ferromagnetic Fe-Ni Alloy Film)
日本金属学会春季大会. April 04, 1995-April 06, 1995.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-14 10:56:33 +0900 Updated at: 2017-07-10 17:31:46 +0900