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シリコンのプラズマ酸化と表面電位の変動
(Change of Sanple Surface Potlntial on Plasma Coxidatron of Silicon)
日本物理学会１９９５年年会. March 28, 1995-March 31, 1995.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 00:56:01 +0900 Updated at: 2017-07-10 17:31:53 +0900