HOME > Presentation > Detail
TEM observation of FIB micromilled Ni silicides thin films
(FIB微細加工したNiシリサイド薄膜の電子顕微鏡観察)
先進材料国際会議. June 16, 1997-June 20, 1997.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 01:16:25 +0900 Updated at: 2023-04-09 15:06:13 +0900