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高時間分解偏光解析によるSi酸化超薄膜成長の実時間観察.
(Real-time Observation of Ultra-Thin Silicon Oxide Film Growth using High Time-Resolution Ellipsometry.)
日本物理学会. March 29, 1993-April 01, 1993.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 00:34:09 +0900 Updated at: 2017-07-10 17:18:44 +0900