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マグネトロンスパッタによりモリブデン上に被覆したＴｉＣ被膜の性質のスパッタ条件による変化
(Changes in Characteristics of Titanium Carbide Coatings Magnetron-Sputtered onto Molybdenum with Deposition Cond)
The 7th Int.Conference on Vacuum Metal. 1982-11-30.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:28:22 +0900 Updated at: 2017-07-10 17:01:27 +0900