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Praparation of Bi-based High-Tc Superconducting Films by Three Target Sequential Sputter Cleposition
(３元交互スパッタ法によるビスマス系高温超伝導体薄膜の合成)
スパッタリング及びプラズマプロセス技術部会. 1996-09-13.
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Created at: 2017-02-14 11:43:30 +0900 Updated at: 2017-07-10 17:38:31 +0900