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プラズマビーム法によるCrN薄膜の面内配向とその成長機構
(In-Plane Texturing and Its Mechanism of CrN Thin Films by Plasma-Beam Assistod Deposition)
表面技術協会講演大会. March 21, 1996-March 23, 1996.
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Created at: 2017-01-08 04:13:43 +0900 Updated at: 2017-07-10 17:35:35 +0900