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(Effects of Coating Layer Materials on Surface Stress-Induced Deflection of Nanomechanical Sensors)
INTERNATIONAL CONFERENCE ON EMERGING ADVANCED NANOMATERIALS. October 22, 2012-October 25, 2012. Invited
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:55:49 +0900 Updated at: 2024-03-05 11:44:15 +0900