(Optimization of Piezoresistive Cantilever Sensors towards Highly Sensitive Membrane-type Surface Stress Sensor (MSS))
8th International Workshop on Nanomechanical Sensing 2011. 2011.
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2017-02-14 11:06:19 +0900更新時刻: 2017-07-10 21:10:31 +0900