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FIB加工したNiシリサイド薄膜のTEM観察
(TEM Observation of FIB-Microfabricated Ni Silicide Thin Films)
第４２回応用物理学関係連合講演会. March 28, 1995-March 31, 1995.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 00:56:33 +0900 Updated at: 2017-07-10 17:32:10 +0900