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窒素イオン注入した炭素膜の構造変化
(Structural Changes of Carbon Films with Nitrogen Ions.)
第１６回イオン注入表層処理シンポジウム. 2000-11-24.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:04:19 +0900 Updated at: 2022-09-05 11:04:19 +0900