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(2D-Array of Nanomechanical Membrane-type Surface Stress Sensor (MSS) and Double-side Coating for Higher Reproducibility)
9th International Workshop on Nanomechanical Sensing 2012. June 06, 2012-June 08, 2012.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:42:09 +0900 Updated at: 2017-07-10 21:23:59 +0900