Self-Temperature-Compensated GaN MEMS Resonators through Strain Engineering
NENS2023 (The 6th International Conference on Nanoenergy and Nanosystems). 2023. 招待講演
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2023-11-27 14:51:22 +0900更新時刻: 2024-01-09 03:09:47 +0900