HOME > Published patent applications > Detail[Published patent application] Ⅲ族窒化物半導体基板およびその製造方法2003-07-09. 2003192496 (Google Patents) NIMS author(s)Created at :2023-07-22 21:44:46 +0900 Updated at :2023-07-22 21:44:46 +0900
