HOME > Published patent applications > Detail[Published patent application] Ⅲ族窒化物半導体基板およびその製造方法2003-07-10. US 03056073 A1 (Google Patents) USO 03056073 A1 (Google Patents) USO2003056073 (Google Patents) WO 03/056073 A1 (Google Patents) WO/2003/056073 (Google Patents) NIMS author(s)Created at :2023-07-22 21:44:52 +0900 Updated at :2023-07-22 21:44:52 +0900
