HOME > Published patent applications > Detail[Published patent application] 酸化物セラミックスパターン化膜の製造方法2003-04-03. 2003096574 (Google Patents) , 3726126NIMS author(s)SAITO, NorikoCreated at :2023-07-22 21:44:45 +0900 Updated at :2023-07-22 21:44:45 +0900