HOME > Published patent applications > Detail[Published patent application] 六方晶窒化ホウ素薄膜の製造方法2022-02-18. 2022029783 (Google Patents) , 7479011NIMS author(s)Created at :2023-07-22 21:46:10 +0900 Updated at :2023-07-22 21:46:10 +0900