HOME > Published patent applications > Detail[Published patent application] 静電アクチュエータ2025-05-19. 2025077298 (Google Patents) NIMS author(s)MINARI, TakeoLI, LingyingCreated at :2025-05-21 03:09:06 +0900 Updated at :2025-05-21 03:09:06 +0900