HOME > Published patent applications > Detail[Published patent application] 半導体層形成用基板とそれを利用した半導体装置2002-01-30. US20020038892 (Google Patents) 1176231 (Google Patents) NIMS author(s)Created at :2023-07-22 21:44:47 +0900 Updated at :2023-07-22 21:44:47 +0900
