結晶性珪素マイクロチューブ及びその製造方法 | SAMURAI, NIMS Researchers Directory Service

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[Published patent application] 結晶性珪素マイクロチューブ及びその製造方法

2006-05-11. 2006117443 (Google Patents) , 4674349

NIMS author(s)

BANDO, Yoshio

Created at :2023-07-22 21:45:02 +0900 Updated at :2023-07-22 21:45:02 +0900

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