HOME > Published patent applications > Detail[Published patent application] 光照射併用プラズマ気相反応法による硬質窒化ホウ素の製造法1994-11-15. H06316402 (Google Patents) , 1995986NIMS author(s)Created at :2023-07-22 21:44:30 +0900 Updated at :2023-07-22 21:44:30 +0900