HOME > Published patent applications > Detail[Published patent application] プラズマ気相反応装置1988-02-13. S63033572 (Google Patents) , 1557137NIMS author(s)FURUBAYASHI, TakaoCreated at :2023-07-22 21:44:19 +0900 Updated at :2023-07-22 21:44:19 +0900
