Ellipsometry studies on nitrogenated diamond-like cabon (DLC) thin films produced by rf magnetron sputtering
(マグネトロンスパッタ方で作成した窒素混入DLC膜の偏光解析法による研究)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:18:14 +0900 Updated at: 2022-09-05 11:18:14 +0900