Positron annihilation study on defects in ion-implanted Si
(陽電子消滅法によるイオン照射したSi中の欠陥の研究)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:11:03 +0900 Updated at: 2022-09-05 11:11:03 +0900