プラズマCVDの基礎と最新動向
(Plasma assisted chemical vapor deposition of covalent-bonded materials in view fo its kinetics and energetics)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2020-11-20 10:39:13 +0900 Updated at: 2020-11-20 10:39:13 +0900