Study of structure and optical properties of β-FeSi2 precipitates formed by ion implantation of Fe+ in Si(100) and effects of | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Study of structure and optical properties of β-FeSi2 precipitates formed by ion implantation of Fe+ in Si(100) and effects of

OYOSHI, Keiji, D.Lenssen, R.Carius, S.Mantl.

Thin Solid Films 194-201. 2001.

NIMS著者

大吉啓司

Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2022-09-05 10:56:11 +0900更新時刻: 2022-09-05 10:56:11 +0900

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