HOME > その他の文献 > 書誌詳細NUMERICAL MODELING AND SPECTROSCOPIC DIAGNOSTICS OF A PULSE-MODULATED INDUCTIVELY COUPLED PLASMARubin, YE, TAGUCHI, Hiroyuki, Hubert, LANGE, KOBAYASHI, Norio, 伊藤滋, T. Watanabe, ISHIGAKI, Takamasa. Symposium Proceedings, 17th Int. Sympo. on Plasma Chemistry 1-6. 2005.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 11:47:17 +0900 更新時刻: 2022-09-05 11:47:17 +0900
