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プラズマジェットを用いるフッ素を含むガスからのcBNの合成
(Plasma jet CVD of cBN from fluorine-contining gases)

松本 精一郎.

NIMS author(s)


    Fulltext and dataset(s) on Materials Data Repository (MDR)


      Created at: 2017-02-14 11:20:35 +0900 Updated at: 2017-04-06 19:04:10 +0900

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