Microstructure, physical and chemical properties of nanostructured (Ti–Hf–Zr–V–Nb)N coatings under different deposition conditions
(異なる堆積条件のナノ構造(Ti-Hf-Zr-V-Nb)N膜の微細構造、物理および化学的性質)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 17:33:18 +0900 Updated at: 2026-10-08 05:22:48 +0900
