Thermochemical properties of Si2F6 and SiF4 in gas and condensed pahses
(ガス及び固体状態のSi2F6及びSiF4の熱力学的性質)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:45:13 +0900 Updated at: 2026-11-09 08:08:21 +0900