HOME > Article > DetailPreparation of palladium film by coating photolysis process using KrF or ArF excimer laserYoji Imai, Tatsuo Tsunoda, Kiyoshi Kobayashi, Akio Watanabe. Applied Surface Science 252 [8] 2858-2866. 2006.https://doi.org/10.1016/j.apsusc.2005.04.045 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 15:08:30 +0900 Updated at: 2026-11-01 05:48:57 +0900
