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Non thermal/equilibrium effects in high power ICP and application to surface modification of materials

ISHIGAKI, Takamasa, 岡田展宏, OHASHI, Naoki, HANEDA, Hajime, 作田忠裕, 岡田展宏, 作田忠裕.

PURE AND APPLIED CHEMISTRY 435-439. 2002.

NIMS author(s)

OHASHI, Naoki

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-11-15 00:40:04 +0900 Updated at: 2022-11-15 00:40:04 +0900

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