HOME > 論文 > 書誌詳細Non thermal/equilibrium effects in high power ICP and application to surface modification of materialsISHIGAKI, Takamasa, 岡田展宏, OHASHI, Naoki, HANEDA, Hajime, 作田忠裕, 岡田展宏, 作田忠裕. PURE AND APPLIED CHEMISTRY 435-439. 2002.NIMS著者大橋 直樹Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-11-15 00:40:04 +0900 更新時刻: 2022-11-15 00:40:04 +0900
