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X-ray absorption near edge structures of silicon nitridfe thin film by pulsed laser deposition

Takeo Suga, Teruyasu Mizoguchi, Masahiro Kunisu, Kazuyoshi Tatsumi, Tomoyuki Yamamoto, Isao Tanaka, Toshimori Sekine.
MATERIALS TRANSACTIONS 45 [7] 2039-2041. 2004.

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