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Electrographic Detection of Pinholes in Ion-Plated Silicon Nitride Film on Molybdenum

M.Fukutomi, M.Okada, R.Watanabe, M.Fukutomi, M.Okada, R.Watanabe.
電気科学(J.Electrochem.Soc.Jpn 47 214. 1979.

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